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Old October 12th, 2020, 11:44 AM
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Default Sathyabama Institute of Science and Technology B.Tech - BioMedical Engineering SBMA3002 BioMEMS And Nanotechnology Syllabus

Sathyabama Institute of Science and Technology B.Tech - BioMedical Engineering SBMA3002 BioMEMS And Nanotechnology Syllabus


SATHYABAMA INSTITUTE OF SCIENCE AND TECHNOLOGY

SBMA3002 BIOMEMS AND NANOTECHNOLOGY

UNIT 1 INTRODUCTION 9 Hrs.
Introduction to MEMS definition, origin of MEMS, types materials and their properties, silicon, silicon compounds, polymers
and metals. MEMS TECHNOLOGY MICROSYSTEM and microelectronics, microsystem and miniaturization.

UNIT 2 MEMS FABRICATION 9 Hrs.
Micro-system, fabrication process, photolithography ,etching- dry etching ,wet etching, electrochemical etching, diffusion
and oxidation ,thin film deposition, LPCVD, sputtering ,evaporation, electroplating, Bulk micromachining, surface
micromachining, LIGA process

UNIT 3 MICROSYSTEMS AND MICROFLUIDS 9 Hrs.
General principles- Microsensors – Actuators- Electrostatic forces- Piezoelectric crystals – Intelligent materials and
structures. Fundamentals of micro fluids, lab – on – a chip devices - Silicon and glass micromachining for micro total
analysis systems.Surface chemistry in polymer microfluidic systems.

UNIT 4 NANOMEDICINE AND ITS APPLICATIONS 9 Hrs.
Nanomaterials –definition, synthesis of nanomaterials, nanofabrication drug delivery to cell using nanotubes and nanowires.
Quantum dots for drug delivery and imaging. Quantum dots for cancer treatment nanorobotics for surgery.

UNIT 5 NANOBIOSENSORS AND ITS APPLICATIONS 9 Hrs.
Nanobiosensors for living cell, carbon nanotubes, synthesis and monitoring antigen antibody reaction. DNA chips, cantilever
based nanosensors, nanotoxicology Trends in MEMS for health care and applications, medical applications for
nanotechnology.
Max. 45 Hrs.

COURSE OUTCOMES
On completion of the course, student will be able to
CO1 - Understands the main issues stemming from operating in micro and nanolength scales.
CO2 - Learns how to effectively utilize the available tools and procedures to analyze and design micro/nano-scale
engineering systems.
CO3 - Understands basic principles, tools and future directions of micro/nanotechnology.
CO4 - Identifies the synthesis of nanomaterials and their technology including theory and experiment.
CO5 - Implement and assess the synthesized nano product in MEMS for healthcare and their importance in biomedical
applications.
CO6 - Analyses to critique journal papers on nanoscience/nanotechnology.


TEXT / REFERENCE BOOKS
1. Tai-Ran Hsu, MEMS & Microsystem, Design and manufacture, McGraw Hill, 2002.
2. Malsch, Neelina H., (ed.), Biomedical Nanotechnology, Washington, DC: CRC Press, 2005
3. Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, 3rd Edition, Three-Volume Set, CRC Press
2011.
4. Mohamed Gad-el-Hak, The MEMS Handbook, CRC Press, 2005
5. Hocine Yahia, Shape Memory Implants Springer Verlag, 2000.


END SEMESTER EXAMINATION QUESTION PAPER PATTERN
Max. Marks: 100 Exam Duration: 3 Hrs.
PART A: 10 Questions of 2 marks each - No choice 20 Marks
PART B: 2 Questions from each unit of internal choice; each carrying 16 marks 80 Marks
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